Fine Piezo Stages

Fine Piezo Stages

Groups

Description

Travel Ranges

Platform Sizes

Load Capacity

Mounting Threads

Max. Speed

Repeatability

Minimum Incremental Motion

Axis Options

standard_grade_mounts
Fine Piezo Stages

SFS piezo stages offer high precision and resolution positioning by utilizing full closed loop control with digital frequency based sensors. Using piezo element actuators, minimum incremental motion as small as 1nm.

266, 355, 532nm

  • 40X40
  • 60X60mm

7-15kg

Metric: M3, M4

NA

±0.05 μm

0.001-0.050μm

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