50nm Feedback Stage - 330x180mm
NFS180-300X
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 50 nm Feedback Stage is available in 8 different table sizes.
The 50 nm Feedback Stage is available in 8 different table sizes.
- Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
- A plugin for the "Autoconfig" function is equipped for user convenience.
- Controllers compatible with the Feedback Stage (NFS series) are available.
| Name | 50nm Feedback Stage - 330x180mm |
|---|---|
| Gewicht | 17.0000kgs |
| Leitfaden | Use a controller (SHRC-203) compatible with Feedback Stage (NFS series). |
| Anmerkung |
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected.
*2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range. Measurement step for 50 nm feedback stage (NFS-X series): 100 nm |
| Achtung |
|
| Verfahrweg | 300mm |
| Material | Aluminium |
| Ladekapazität | 196N (20.0kg) |
| Stage Size | 330x180mm |
| Finish | Black anodized |
| Feed Screw | Ball screw diameter φ10mm, 2mm lead |
| Resolution (Full) | 4μm/pulse *1 |
| Resolution (Half) | 2μm/pulse *1 |
| MAX Speed | 20mm/sec |
| Positioning Accuracy | 2μm *2 |
| Positional Repeatability | 0.6μm *2 |
| Micro-range Bi-directional Repeatability | ±100nm *3 |
| Minimum Incremental Motion (reference) | 150nm |
| Moment Stiffness / Pitch | 0.02″/N･cm |
| Moment Stiffness / Yaw | 0.02″/N･cm |
| Moment Stiffness / Roll | 0.02″/N･cm |
| Lost Motion | 0.6μm |
| Backlash | 1μm |
| Parallelism | 100μm |
| Running Parallelism | 20μm |
| Pitch | 20″ |
| Yaw | 20″ |
| Motor / Motor Type | 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.） |
| Motor / Motor Part Number | PK545NBW (□42mm) |
| Scale Resolution | 50nm |
Auf Lager
SKU
NFS180-300X
7.392,90 €
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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 50 nm Feedback Stage is available in 8 different table sizes.
The 50 nm Feedback Stage is available in 8 different table sizes.