50nm Feedback Stage - 110x60mm
NFS60-40X
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 50 nm Feedback Stage is available in 8 different table sizes.
The 50 nm Feedback Stage is available in 8 different table sizes.
- Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
- A plugin for the "Autoconfig" function is equipped for user convenience.
- Controllers compatible with the Feedback Stage (NFS series) are available.
| Name | 50nm Feedback Stage - 110x60mm |
|---|---|
| Gewicht | 1.0000kgs |
| Leitfaden | Use a controller (SHRC-203) compatible with Feedback Stage (NFS series). |
| Anmerkung |
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected.
*2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range. Measurement step for 50 nm feedback stage (NFS-X series): 100 nm |
| Achtung |
|
| Verfahrweg | 40mm |
| Material | Aluminium |
| Ladekapazität | 49N (5.0kg) |
| Stage Size | 110x60mm |
| Finish | Black anodized |
| Feed Screw | Ball screw diameter φ4mm, 1mm lead |
| Positioning Slide | Crossed roller |
| Resolution (Full) | 2μm/pulse *1 |
| Resolution (Half) | 1μm/pulse *1 |
| MAX Speed | 10mm/sec |
| Positioning Accuracy | 1μm *2 |
| Positional Repeatability | 0.5μm *2 |
| Micro-range Bi-directional Repeatability | ±100nm *3 |
| Minimal Incremental Motion | 150nm |
| Moment Stiffness / Pitch | 0.5″/N･cm |
| Moment Stiffness / Yaw | 0.5″/N･cm |
| Moment Stiffness / Roll | 0.5″/N･cm |
| Lost Motion | 0.5μm |
| Backlash | 1μm |
| Parallelism | 50μm |
| Running Parallelism | 10μm |
| Pitch | 15″ |
| Yaw | 15″ |
| Motor / Motor Type | 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.） |
| Motor / Motor Part Number | PK523PMB-C5（□28mm） |
| Scale Resolution | 50nm |
Auf Lager
SKU
NFS60-40X
3.745,70 €
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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 50 nm Feedback Stage is available in 8 different table sizes.
The 50 nm Feedback Stage is available in 8 different table sizes.