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1nm Feedback Stage - 75x60mm

NFS60-20UPX

CE
main product photo
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 1 nm Feedback Stage is available in 6 different table sizes.
  • Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
  • A plugin for the "Autoconfig" function is equipped for user convenience.
  • Controllers compatible with the Feedback Stage (NFS series) are available.
Weitere Informationen
Name 1nm Feedback Stage - 75x60mm
Gewicht 0.5000kgs
Leitfaden
  • Use a controller (SHRC-203) compatible with Feedback Stage (NFS series).
Anmerkung *1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected.
*2 Values when the multi-point error compensation function is enabled.
*3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range. Measurement step for 1 nm feedback stage (NFS-UPX series): 5 nm
Achtung
  • When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃)
  • Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment.
  • Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur.
  • Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.
Verfahrweg 20mm
Material Aluminium
Ladekapazität 49N (5.0kg)
Stage Size 75x60mm
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 1μm/pulse　*1
Resolution (Half) 0.5μm/pulse　*1
Positioning Accuracy 1μm *2
Positional Repeatability 0.4μm *2
Micro-range Bi-directional Repeatability ±4nm *3
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.5″/N･cm
Moment Stiffness / Yaw 0.5″/N･cm
Moment Stiffness / Roll 0.5″/N･cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 1nm
Auf Lager
SKU
NFS60-20UPX
6.900,00 €

Delivery in : 1 week

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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 1 nm Feedback Stage is available in 6 different table sizes.

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