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50nm-Resolution Stage Controllers, 2-axes, for FS-X Series Stages (except FS-3200X, 3300X, and 3400X)

FC-411

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Dedicated controller for sub micron feedback stage (FS-X series) to control with sub micron resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.

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FC-411

Dedicated controller for sub micron feedback stage (FS-X series) to control with sub micron resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.

50nm-Resolution Stage Controllers, 2-axes, for FS-X Series Stages (except FS-3200X, 3300X, and 3400X)

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