XY Piezo Stage Aperture Type
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Precision XY positioning stage
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50mm x 50mm aperture
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Software available for easy PC control and data acquisition
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RS-232C, GP-IB and USB interface
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Ideal for a wide range of applications
The XY piezo aperture stage provides high-resolution, nano-positioning with a 50mm x 50mm aperture. When used with our FINE controller and your selected software they provide the performance and stability needed by many applications.
The stage has resolution of less than 1nm and travel up to 100 microns and makes these stages ideal for a wide range of applications. Wide range of applications include: scanning microscopy, metrology, surface structure analysis, semiconductor test equipment, precision mask and wafer alignment, scanning interferometer, imaging, biotechnology systems.
| Number | |
|---|---|
| 510-0120 |
| Piezo Travel (μm) | Load Capacity (Kg) | Axes of Travel | Weight (Kg) | Model | Resolution Closed Loop | Resolution Open Loop | Cables | Open Loop Repeatability | Piezo Travel (µm) |
|---|---|---|---|---|---|---|---|---|---|
| - | 1.5 | 2 | 1.2 | SFS-120XY (WA) | 10nm | ~1nm | FINE-CA-3, 2 required, DS1-CA-3, 2 required | <0.1micron | 100 ± 15 |