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Stage Type |
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Travel (µm) |
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Travel Course (arcmin) |
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Travel Fine (arcsec) |
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Table Size (mm) |
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Load Capacity (Kg) |
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Open-Loop Resolution (arcsec) |
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Positional Repeatability (µm) |
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Weight (Kg) |
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Model |
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Dimensions |
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Sensor Resolution |
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Straightness (Y and Z direction) |
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Resolution |
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Linearity |
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Piezo Travel (µm) |
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Axes of Travel |
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Resolution Closed Loop |
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Resolution Open Loop |
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Cables |
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Open Loop Repeatability |
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Axes of Travel (DC) |
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Sigma Fine Piezo Stages
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Compact, modular design
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X, XY, XYZ, 2-axis tilt and rotation available
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Unique F/D digital closed loop sensor
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Active error compensation for precise linear trajectory control
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New models include smaller 40mm sizes
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Improved resolution, stiffness, accuracy, linearity, load capacity and speed
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Compatible with our FINE series of controllers
Add Selected to Cart Compare Selected
| Stage Type | Travel (µm) | Travel Course (arcmin) | Travel Fine (arcsec) | Table Size (mm) | Load Capacity (Kg) | Open-Loop Resolution (arcsec) | Positional Repeatability (µm) | Weight (Kg) | Model | Dimensions | Sensor Resolution | Straightness (Y and Z direction) | Resolution | Linearity | Piezo Travel (µm) | Axes of Travel | Resolution Closed Loop | Resolution Open Loop | Cables | Open Loop Repeatability | Axes of Travel (DC) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Rotation | - | 57 | 900 | - | 1 | 0.01 | - | 0.31 | SFS-60YAW (OP) | ±0.2mm | 10nm | 1 micron | 1nm | <0.3% | - | - | - | - | - | - | - |
| Gonio | - | 25 | 215 | - | 1 | 0.005 | - | 0.38 | SFS-60RP (OP) | ±0.2mm | 10nm | 1 micron | 1nm | <0.3% | - | - | - | - | - | - | - |
| Linear | 90 | - | - | 40 x 40 | 1 | - | 0.1 | 0.28 | SFS-H40X (CL) | ±0.2mm | 10nm | 1 micron | 1nm | <0.3% | - | - | - | - | - | - | - |
| Linear | 100 | - | - | 40 x 40 | 0.7 | - | 0.1 | 0.28 | SFS-H40Z (CL) | ±0.2mm | 10nm | 1 micron | 1nm | <0.3% | - | - | - | - | - | - | - |
| Linear | 100 | - | - | 60 x 60 | 2 | - | 0.1 | 0.4 | SFS-H60X (CL) | ±0.2mm | 10nm | 1 micron | 1nm | <0.3% | - | - | - | - | - | - | - |
| Linear | 100 | - | - | 60 x 60 | 1.5 | - | 0.1 | 0.43 | SFS-H60XY (CL) | ±0.2mm | 10nm | 1 micron | 1nm | <0.3% | - | - | - | - | - | - | - |
| Linear | 100 | - | - | 60 x 60 | 1 | - | 0.1 | 0.33 | SFS-H60XYZ (CL) | ±0.2mm | 10nm | 1 micron | 1nm | <0.3% | - | - | - | - | - | - | - |
| Linear | 100 | - | - | 60 x 60 | 1 | - | 0.15 | 0.63 | SFS-H60Z (CL) | ±0.2mm | 10nm | 1 micron | 1nm | <0.3% | - | - | - | - | - | - | - |
| - | - | - | - | - | 1.5 | - | - | 1.2 | SFS-120XY (WA) | - | - | - | - | - | 100 ± 15 | 2 | 10nm | ~1nm | FINE-CA-3, 2 required, DS1-CA-3, 2 required | <0.1micron | - |
| - | - | - | - | - | - | - | - | 0.15 | SFS-OBL-1 | - | - | - | - | - | 100 ± 15 | - | - | - | - | - | 1 |